Etching machine

ABSTRACT

An apparatus for processing an article comprising a movable spray chamber which can be positioned around the article to prevent spray liquids from contaminating other processing liquids. The movable spray chamber permits more rapid spraying of the article after the article is removed from another processing liquid.

United States Patent Ousterling et a1.

ETCl-llNG MACHINE Inventors: David L. Ousterling, Mountain Lakes; HaroldF. Jones, Dover, both of NJ.

Assignee:

' Filed:

Allied Chemical Corporation, New York, NY.

Apr. 29, 1974 Appl. No.1 465,441

U.S. C1

Int. Cl

Field of Search 134/56 R, 57 R, 94, 95, 134/97, 98, 133,135,140, 141,143,145,

References Cited UNITED STATES PATENTS Rockwell 134/146 1 1 June 17,1975 2,258,562 10/1941 Arey et a1 134/146 X 2,703,581 3/1958 Culhane134/133 2.747.590 5/1956 lpscn 134/143 X 2,972,352 2/1961 134/155 X3,070,104 12/1962 Faust et a1. 3,414,249 12/1968 Mes/Cher ct a1.

R17,673 5/1930 Zademach 134/97 X Primary E.raminerRobert L. BleutgeAttorney, Agent, or Firm-Michael L. Dunn; Anthony J. Stewart [57}ABSTRACT An apparatus for processing an article comprising a movablespray chamber which can be positioned around the article to preventspray liquids from contaminating other processing liquids. The movablespray chamber permits more rapid spraying of the article after thearticle is removed from another processing liquid.

12 Claims, 10 Drawing Figures PATENTEDJUH 17 ms SHEET 3 PATENTEDJUN 17I975 SHEET PATENTEDJUN 1 7 I975 SHEET @wx Nb ETCHING MACHINE BACKGROUNDOF THE INVENTION Many of the distinct steps involved in manufacturingelectronic semi-conductor devices involve the use of liquid chemicals.Prior art workers have attempted to provide continuous type machines forconducting the various steps involved in the manufacture of electronicsemic0nductor devices. for example. US. Pat. Nos. 3.2l9.509; 3.388.023;3,630,804; 3.657.049; 3.663.724 and 3.727.620.

Apparently. for reasons of complexity, economics, reliability. lack ofuniform results or other reasons, these devices have not met with wideacceptance in the semi-conductor manufacturing industry since thepractice of conductingthese liquid chemical treatment steps by means ofsmall individual batches is still widespread in the industry. Thesebatch-wise processes are conducted in small vessels. usually less than 5gallons of liquid and typically about 1 gallon. The workpieces orarticles are transported manually through the individual process steps.Operator variables such as overor under-processing. contamination.incorrect bath com positions and the like are becoming economicallyunacceptable since mass handling of articles cannot be accomplished andsince finished workpieces do not consistently meet necessary standards.

The operator variables become particularly noticeable in etchingoperations.

Etching generally refers to methods of removal of selected exposed areasof metallic or dielectric films by means of oxidation and/ordissolution. Many etching steps are used in semi-conductor manufactureand in order to obtain uniform and satisfactory results, require precisetemperature control of the etching solution and precise control ofetching time. In controlling etching time. the time period during whichthe workpiece is ex posed to etching solution must be preciselycontrolled. This time of exposure includes not only the time duringwhich the workpiece is immersed in etching solution but also includesthe time period between removal of the workpiece from the etchingsolution to the time that the etching solution is rinsed or washed fromthe workpiece. In order to obtain a uniform etching result the timeperiod between removal from the solution to the time the workpiece isrinsed must be precisely controlled. Furthermore since etching solutiondrips from the workpiece after the workpiece is removed from thesolution thus causing varying concentrations of etching solution uponthe workpiece. the time period between removal from the etching solutionbath to the time that the etching solution is rinsed from the workpiecemust be minimized. In the prior art the time period between removal fromthe bath to the time that the etching solution is rinsed from theworkpiece has not been sufficiently controlled and in addition has notbeen sufficiently minimized.

A serious disadvantage of prior art apparatus for processing articleshas been cumbersome conveyor systems which necessarily require anextended period of time for transfer of the workpiece from oneprocessing step to another. Such extended time periods should beavoided. particularly when the workpiece is being re moved from anetching solution and is being trans ferred to a processing step forremoval of the etching solution from the workpiece.

ill

BRIEF DESCRIPTION OF THE INVENTION In accordance with this invention animproved apparatus is provided for processing an article which apparatuscomprises a carrier for the article. means for moving the carrier andarticle downwardly into a bath containing a first liquid. means forlifting the carrier and article upwardly from the bath. a spray chamberseparate from the bath and means for spraying the article on the carrierwith a second liquid when the carrier and article are in the spraychamber. The improvement in the apparatus comprises a spray chamberhaving a movable portion and means for moving the movable portion toposition the spray chamber around the carrier and article and betweenthe article and the bath after the carrier and article are liftedupwardly from the bath by the lifting means.

It has been found that the spray chamber can be positioned around thecarrier and article more rapidly than the carrier and article can belifted by a conveyor, carried horizontally to a position above anotherprocessing zone and then lowered into the processing zone. Since lesstime is required for positioning the spray chamber around the carrierand article, in an etching process, less time is required betweenremoval ofthe carrier and article from an etching bath to the time thatthe carrier and article can be sprayed by a rinse liquid to remove andneutralize residual etching solution.

When the apparatus is used in an etching procedure the bath is usuallydefined by double walls between which a temperature control liquid flowsto maintain the bath at a constant temperature. The time betweenmovement of the article downwardly into the bath and the time that thecarrier and article are lifted upwardly from the bath is preciselycontrolled by a timing means. thus precise time control for theprocessing step is obtained. Such precise time control is particularlyimportant in etching operations.

The apparatus permits mass handling of articles with less contaminationand fewer variables in processing conditions, such as varying time andtemperatures.

In addition the apparatus permits mechanical and automatic handling ofarticles in less space than is required by prior art apparatus in thatno continuous overhead conveying means is required for moving thearticle and carrier from one processing zone to another processing zone.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front elevational view ofthe apparatus of the preferred embodiment of the invention;

FIG. 2 is a right end elevational view ofthe apparatus shown in FIG. 1;

FIG. 3 is a top view of the apparatus shown in FIG. 1;

FIG. 4 is a top sectional view taken along line 44 of FIG. 1;

FIG. 5 is a front sectional view taken along line 55 of FIG. 4.

FIG. 6 is the front sectional view of FIG. 5 wherein the article andcarrier are in the spray chamber;

FIG. 7 is an end sectional view taken on line 7-7 of FIG. 5;

FIG. 8 is an end sectional view taken on line 88 of FIG. 5;

FIG. 9 is a schematic diagram showing the operation of the spray meansof the preferred embodiment; and.

FIG. [0 is a schematic diagram showing a means for supplying firstliquid to the bath and a means for maintaining the first liquid in thebath at a constant temperature.

DETAILED DESCRIPTION OF THE INVENTION The invention herein comprises animproved apparatus for processing an article which comprises a carrierfor the article, means for moving the carrier and article downwardlyinto a bath containing a first liquid. means for lifting the carrier andarticle upwardly from the bath, a spray chamber separate from the bathand means for spraying the article on the carrier with a sccond liquidwhen the carrier and article are in the spray chamber wherein theimprovement comprises a spray chamber having a movable portion and meansfor moving the movable portion to position the spray chamber around thecarrier and article and between the article and the bath after thecarrier and article are lifted up \vartlly from the bath by the liftingmeans.

In the preferred embodiment the spray chamber comprises a verticallydirected stationary first end wall and a horizontally movable portioncomprising a bot tom wall. first and second vertical side walls securedto the bottom wall at their lower edges and a vertical second end wallhaving a lower edge. The end wall is sc cured proximate its lower edgeto the bottom wall. is secured proximate its first vertical edge to thefirst vertical side wall and is secured proximate its second verticaledge to the second vertical side wall. The horizontally movable portionhas an open end opposite the second end wall and facing the stationaryfirst end wall portion. The open end is defined by unsecured edges ofthe side and bottom walls. The open end is contiguous to and engages thestationary first end wall portion when the spray chamber is positionedaround the article. Preferably the horizontally movable portion of thespray chamber is supported by and can slide upon at least one horizontaltrack.

The means for moving the movable portion to the spray chamber around thecarrier and article preferably comprises a rack secured along thehorizontal length of the movable portion of the spray chamber. a pinionengaged with the rack. 21 first drive means for rotating the pinion inthe rack thus causing the rack and movable portion of the spray chamberto move in a horizontal direction. so that rotating the first drivemeans in a forward direction causes the movable portion of the spraychamber to move toward the stationary first end wall so that spraychamber is positioned around the article. The means for moving themovable portion desirably further comprises a means for activating thefirst drive means in a foward direction upon upward lifting of thecarrier and article. The apparatus which permits positioning ofthe spraychamber around the carrier and article permits spraying of the articlewith a second liquid e.g. a rinse liquid, to commence more rapidly thanif the carrier and article had to be conveyed horizontally after beingremoved from the first liquid eg. an etching solution. and subsequentlylowered into a second treatment zone before spraying of the article witha second liquid could begin.

In the preferred embodiment the apparatus further comprises means formoving the movable portion of the spray chamber away from the stationaryfirst end wall so the carrier holding another article to be processedcan again be moved downwardly into the bath.

In the preferred embodiment the means for moving the movable portion ofthe spray chamber away from the stationary first end wall is the samethe positioning means and the movement away from the stationary firstend wall is accomplished by reversing the drive means.

Preferably the means for moving the carrier down wardly comprises aholding means for holding the carrier; an arm having contiguous verticaland horizontal sections and first and second ends. the first end beingat the lowermost portion ofthe vertical section and the second end beingat a position on the horizontal sections farthest from the verticalsection, said arm being connected to the holding means proximate itsfirst. end and extending upwardly from the holding means; a ver ticallymovable plate having an attached vertical rack said vertically movableplate being secured to the arm proximate its second end; a stationaryguide for engaging and for holding the vertically movable plate whilepermitting the vertically movable plate to move in a vertical direction;a second pinion engaged with the rack so that the rack, attached plate.arm and holding means move in a downward vertical direction upon therotation of the pinion in a forward direction; and a second drive meansfor rotating the pinion in a forward di rection. Preferably the liftingmeans and means for moving the carrier and article downwardly are thesame and the carrier is lifted by causing the drive means to rotate thepinion in a reverse direction.

In the preferred embodiment the means for activat ing the first drivemeans in a direction which causes the movable portion of the spraychamber to move toward the stationary first end wall comprises a feelerswitch which is activated by the lifting means when the holding meanshas been lifted from the bath by a sufficient distance to permitpositioning of the spray chamber around the article to separate thearticle from the bath.

Desirably the spray means comprises at least one nozzle preferablylocated at a position above the car rier and article and is preferablysecured to the means for moving the carrier and article downwardly. Thenozzle is connected to a supply of second liquid under pressure. Thespray means preferably further coinprises a normally closed automaticvalve having an inlet and outlet; a normally open automatic valve havingan inlet and outlet; a tee having first, second and third openings; afirst conduit connecting the nozzle to the first opening of the tee; asecond conduit connecting the second opening of the tee to the outlet ofthe normally closed valve; 21 third conduit connecting the third openingof the tee to the inlet of the normally open valve; a fourth conduitconnecting the inlet opening of the normally closed valve to the supplyof the second liquid; a fifth conduit connecting the outlet of thenormally open valve to a drain and means for opening the normally closedvalve and closing the normally open valve when the spray chamber hasbeen positioned around the article and carrier thus permitting secondliquid to pass from the supply of second liquid through the fourthconduit, the normally closed valve. the second conduit, the tee, thefirst conduit and the nozzle to the article. The spray means furtherdesirably comprises means for again closing the normally closed valveand opening the normally open valve when spray ing is complete thusstopping the flow of second liquid from the supply of second liquid andpermitting the second liquid in the nozzle, first conduit. and the teeto drain through the third conduit, normally open valve and fifthconduit to the drain.

The bath into which the article is moved comprises an open top containerwhich preferably is defined by an internal side wall and internal bottomwall sealed to the internal side wall and an external side wall andexternal bottom wall sealed to the external side wall which externalside wall and external bottom wall are arranged in spaced relationshipwith the internal side wall and bottom wall so that first liquid in thebath can be maintained at a constant predetermined temperature bycirculating a liquid having controlled temperature between the internaland external walls.

DETAILED DESCRlPTlON OF THE PREFERRED EMBODIMENT OF THE lNVENTlONReferring now to the drawings as best seen in FIGS. 1, S, 6 and 7carrier 10 is provided for holding article 11. The means for movingcarrier 10 and article I] downwardly into bath 12 containing firstliquid 14 comprises a holding means in the form of basket 16 for holdingcarrier 10. The means for moving the carrier downwardly furthercomprises an arm [8 having vertical section 20 and horizontal section22. The arm has a first end 24 at the lowermost portion of the verticalsection and a second end 26 at a position on the horizontal section 22farthest from vertical section 20. Arm 18 is connected proximate itsfirst end to basket 16. The means for moving the carrier downwardlyfurther comprises a vertically movable plate 28 having an attachedvertical rack 30. Vertically movable plate 28 is secured to arm 18proximate second end 26. A stationary guide 32 is provided for engagingand holding vertically movable plate 28 while permitting verticallymovable plate 28 to move in a vertical direction. A pinion 34 isprovided and is engaged with vertical rack so that rack 30. plate 28,arm 18 and basket l6 move in a downward vertical direction upon therotation of pinion 34 in a forward direction. A second drive means 36 isprovided as previously discussed, for rotating pinion 34 in a forwarddirection. The drive means may be any suitable device for providing arotating motion to pinion 34 such as a gear motor.

In the preferred embodiment the lifting means and means for movingcarrier 10 and article ll downwardly are the same and carrier 10 andarticle ll are lifted by causing drive means 36 to rotate the pinion ina reverse direction.

As best seen in FIGS. 5, 6 and 7 bath 12 comprises a first liquid 14held by container 50 defined by an inner side wall 38 connectedproximate its lower edge 40 to an inner bottom wall 42. Located inspaced relationship with inner side wall 38 and inner bottom wall 42 areouter side wall 44 and outer bottom wall 46. Outer side wall 44 isconnected at its lower edge to outer bottom wall 46. lnner side wall 38.inner bottom wall 42. outer side wall 44 and outer bottom wall 46 dofine a hollow space 47 through which a temperature controlled liquid 48flows to maintain first liquid 14 held by container 50 at a constanttemperature. Container 50 is defined by inner side wall 38 and innerbottom wall 42. In the preferred embodiment an over-flow drain 52 isprovided so that the level of first liquid 14 does not reach a highenough level to escape from the top of container 50. First liquid 14 isprovided to com tainer 50 through inlet 54.

As best seen in FIGS. 1. 4, 5, 6 and 8. spray chamber 56 which isseparate from bath 12 comprises and is defined by vertically directedstationary first end wall 58 and horizontally movable portion 60.Horizontally movable portion 60 comprises bottom wall 62, first andsecond vertical side walls 64 and 66 and second vertical end wall 68.First and second vertical side walls 64 and 66 have lower edges 70 and72 secured to bottom wall 62. End wall 68 has a lower edge 74 which maybe secured to bottom wall 62. a first vertical edge 76 secured to thefirst vertical side wall 64 and a second vertical edge 78 secured tosecond vertical side wall 66. A drain is preferably provided betweensecond end wall 68 and bottom wall 62. Horizontally movable portion 60has an open end 80 opposite second vertical end wall 68 and facingstationary first end wall 58. Open end 80 is defined by unsecured edges82. 84 and 86 of vertical side walls 64 and 66 and bottom wall 62. Openend 80 is contiguous with and engages stationary first end wall 58 whenspray chamber 56 is positioned around carrier 10 and article ll.

Preferably horizontally movable portion 60 of spray chamber 56 issupported by, and can slide upon. horizontal tracks 88 and 90.

ln the preferred embodiment the means for POSlIlOIP ing the spraychamber preferably comprises racks 92 and 94 secured along thehorizontal length of movable portion 60 of spray chamber 56. Pinions 96and 98 are engaged with racks 92 and 94 respectively and are eachattached to a first drive means 100 for rotating each pinions 96 and 98in racks 92 and 94 thus causing racks 92 and 94 and movable portion 60of spray chamber 56 to move in a horizontal direction. Means is providedfor activating first drive means 100 in a direction which causes movableportion 60 of spray chamber 56 to move toward stationary first end wall58 upon upward lifting of carrier 10 and article ll so that spraychamber 56 is positioned around carrier 10 and article 1]. In thepreferred embodiment the means for activating first drive means 100 uponupward lifting of carrier [0 and article ll is a first feeler switch 102which is contacted by arm 18 upon upward movement of carrier 10. article11, basket 16 and arm 18. First feeler switch 102 activates a relay, notshown, located in control box 104 which relay in turn activates firstdrive means 100. hi the preferred embodiment the apparatus further comprises means for moving movable portion 60 of spray chamber 56 away fromstationary first end wall 58 so that the carrier 10 can again be moveddownwardly into bath 12. Preferably the means for moving movable portion60 of spray chamber 56 away from stationary first end wall 58 is thesame as the positioning means and the movement away from stationaryfirst end wall 58 is accomplished by reversing the drive means. in thepreferred embodiment the drive means is reversed either by manuallyclosing a switch. not shown, thus reversing drive means 100 or by meansof feeler switch 142 which fceler switch 142 activates a relay which inturn reverses drive means 100.

The means for spraying article 11 on carrier 10 with a second liquid 106preferably comprises at least one and desirably a plurality of nozzles108 connected to a conduit or pipe 110 which norzle 108 and conduit I10are secured to arm 18 at a position above carrier 10 and article 11.Preferably the conduit H0 is connected to one end ofa flexible coiledhose 1 l2. The other end of flexible hose 112 is connected to oneorifice of the tee 114. Another orifice of the tee is connected to aconduit 116 which is in turn connected with a normally open solenoidvalve 118. The remaining opening ofthe tee is connected by means of aconduit 120 to a normally closed solenoid valve 122 which is in turnconnected with a supply 125 of second liquid 106. A means is providedfor opening normally closed solenoid valve 122 and closing normally opensolenoid valve 118 when carrier 10 and article 11 have been positionedin spray chamber 56.

Desirably the means for closing solenoid valve 118 and opening solenoidvalve 122 is a feeler switch 124 which is activated by movable portion60 of spray chamber 56 when movable portion 60 is positioned so that itsopen end 80 is in contact with stationary first end wall 58. Feelerswitch 124 is in turn connected with a relay located in control box 104which relay in turn closes solenoid valve 118 and opens solenoid valve122.

The spraying is stopped either by actuating a manual switch which againopens solenoid valve 118 and closes solenoid valve 122 thus permittingliquid which is retained in conduit 110 to drain through hose 112, tee114, conduit 116, and normally open solenoid valve 118 to a waste linethus preventing residual second liq uid retained in conduit 110 fromdripping from nozzle 108. Solenoid valve 118 can again be opened andsolenoid valve 122 can again be closed automatically by means of a timerconnected to solenoid valves 118 and 122 which timer is located incontrol box 104.

ln operation of the preferred apparatus of the invew tion first liquide.g, etching solution 14 contained in reservoir 126 is supplied throughconduit or pipe 128 by means of pump 130 to bath 12. Pump 130 is activated by any suitable means which determines when additional firstliquid 14 is needed in bath 12. The means for determining whenadditional liquid is needed in bath 12 may be manual or any suitabledevice such as a capacitance level control indicator float switch, ormeans for determining liquid dragout and evaporation. Desirablyadditional liquid is added to the bath only when article 11 is not inthe bath. The temperature of first liquid 14 in bath 12 is maintained bycirculating a temperature controlled liquid 48 between inner wall 37 andouter wall 43 of bath 12. The temperature con trolled liquid 48 is heldin a container 130 and is heated by a heating coil 132 through which hotwater is circulated when a valve 134 is opened. Temperature controlledliquid 48 is cooled by cooling coil 136 through which cold water passeswhen valve 138 is opened. A sensing device 139 determines when firstliquid 14 is either too hot or too cold. Sensing device 139 is connectedto relays in control box 104 so that when the temperature of firstliquid 14 is too low sensing device 139 activates a relay in control box104 which in turn opens valve 134 thus permitting hot water to passthrough heating coil 132. When sensing device 139 de tects that thetemperature of first liquid 14 is too hot it activates another relaywhich opens valve 139 and closes valve 134 thus preventing hot waterfrom passing through heating coil 132 and permitting cold water to passthrough cooling coil 136. When sensing device 139 detects that firstliquid 14 is neither too hot nor too cold a relay is activated whichcloses both valves 134 and 138. The temperature controlled liquid 48 iscirculated from container 130 through a pipe or conduit 140 by means ofpump 142. Bath 12 is provided with an over-flow drain 52 which preventsfirst liquid 14 from reaching a level above the overflow drain in bath12.

In operating the apparatus of the preferred embodiment best seen inFIGS. land 7 basket 16 is initially in a position above both bath 12 andspray chamber 56 so that a carrier 10 and article 11 can easily beplaced upon and removed from the basket. After carrier 10 and article 11are placed upon the basket the apparatus of the invention is manuallyactivated by closing a switch located in control box 104. The closing ofthe switch either directly or through a relay causes drive means 36 torotate pinion 34 so that vertical rack 30 moves in a downward directionwhich in turn simultaneously moves vertically movable plate 28, arm 18and attached basket 16 in a downward direction. As arm 18 movesdownwardly feeler switch 142 is closed thus activating drive meanseither directly or through a relay. in a direction which causeshorizontally movable portion 60 of spray chamber 56 to move away fromstationary first end wall 58 thus permitting basket 16, car rier 10 andarticle 11 to pass by spray chamber 56 downwardly into bath 12.Alternately the switch in control box 104 can directly activate drivemeans 100. When horizontally movable portion 60 of spray chamber 56moves a sufficient distance away from stationary first end wall 58 itcontacts switch 144 which either direetly or through a relay deactivatesdrive means 100 thus preventing further movement of movable portion 60to spray chamber 56 until drive means 100 is again activated When basket16, carrier 10 and article 11 have reached a position where carrier 10and article 11 are immersed in first liquid 14 contained in bath 12, arm18 contacts switch 146 which either directly or through a relay causesdrive means 36 to become deactivated thus preventing further downwardmovement of basket 16. carrier 10 and article 1]. Simultaneously switch146 activates a timer located in control box 104.

After the expiration of a predetermined amount of time set on the timer.drive means 36 is reactivated in a direction which causes pinion 34 tomove vertical rack 30 in an upward direction thus carrying verticallymovable plate 28, arm 18 and attached basket 16 which is holding carrier10 and article 11 upwardly from bath 12.

When arm 18 has moved a sufficient distance in an upward direction itcontacts switch 102 which directly or through a relay deactivates drivemeans 36 and activates drive means 100 in a direction which causes racks92 and 94 to move horizontally movable portion 60 of spray chamber 56toward stationary first end wall 58. When horizontally movable portion60 has moved to a position where open end 80 contacts stationary firstend wall 58 switch 124 is opened by the position of hor izontallymovable portion 60 which again deactivates drive means 100. Switch 124simultaneously closes valve 118 and opens valve 122 thus permittingsecond liquid 106 to pass through conduit to nozzles 108. Second liquid106 then passes through nozzles 108 and is directed by the nozzles uponarticle 11 thus rinsing residual first liquid 14 from article 11. Switch124 also activates a timer located in control box 104 which after theexpiration of a preset amount of time activates a warning buzzer thussignalling an operator. The operator then manually closes a switchlocated on control box 104 which activates drive means 36 in a directionwhich causes basket 16, carrier 10 and article 11 to move upwardly intothe original load-unload position. Alternatively the timer. eitherdirectly or through a relay may activate drive means 36 in a directionwhich causes basket 16, carrier 10 and article H to move upwardly to theload-unload position. After basket 16. carrier 10 and article ll havereached the load-unload position arm 18 contacts switch 142 whichdeactivatcs drive means 36 thus preventing further upward motion ofbasket ]6. carrier 10 and article ll.

The apparatus of the invention is desirably provided with a channel 148located around the periphery of spray chamber 56 when horizontallymovable portion 60 is located in a position so that open end abutsstationary first end wall 58. Channel 148 is provided so that secondliquid being sprayed upon article 11 flows downwardly into channel 148and along channel 148 into either chamber 150 or chamber 152. Chambers150 and 152 may be connected to drains 154 and 156 respectively fordisposing of second liquid which has been used.

The apparatus desirably is provided with a venting means 158 forremoving vapors above bath 12 which may be emitted by first liquid 14.Venting means 158 preferably comprises an exhaust fan 160 which isconnected by any suitable conduit [62 to a position directly above theliquid level of first liquid 14 in bath 12.

The apparatus of the invention permits basket 16, carrier 10 and article1] to be rapidly positioned within spray chamber 56 without unnecessaryvertical motion which would be required by an overhead conveyor formoving basket 16. carrier 10 and article 11 to a sepa rate spray zone.The elimination of unnecessary verti cal motion permits spraying ofarticle ll to remove excess first liquid remaining on article ll afterit is removed from bath 12 to commence in less time than would otherwisebe required. In addition the apparatus of the invention permitselimination of overhead conveyors thus desirably reducing the size ofthe apparatus.

We claim:

1. In an apparatus for processing an article compris ing a carrier forthe article. means for moving the can rier and article downwardly into abath containing a first liquid. means for lifting the carrier andarticle upwardly from the bath. a spray chamber separate from the bathand means for spraying the article on the carrier with a second liquidwhen the carrier and article are in the spray chamber; the improvementcomprising a spray chamber having a movable portion and means for movingthe movable portion to position the spray chamber around the carrier andarticle and between the article and the bath after the carrier andarticle are lifted upwardly from the bath by the lifting means.

2. The apparatus of claim 1 wherein the spray chamber comprises avertically directed stationary first end wall and a horizontally movableportion comprising a bottom wall. first and second vertical side wallssecured to the bottom wall at their lower edges and a vertical secondend wall ha\ing a lower edge. said end wall being secured proximate itslower edge to the bottom wall. secured proximate its first vertical edgeto the first vertical side wall and proximate its second vertical edgeto the second vertical sidewall. said horizontally movable portionhaving an open end opposite the second end wall facing the stationaryfirst end wall portion, said open end being defined by unsecured edgesof the side and bottom walls. said open end being contiguous to andengaging the stationary first end wall portion when the spray chamber ispositioned around the anti cle.

3. The apparatus of claim 2 wherein the horizontally movable portion ofthe spray chamber is supported by and can slide upon at least onehorizontal track.

4. The apparatus of claim 3 wherein the means for moving the movableportion comprises a rack secured along the horizontal length of themovable portion of the spray chamber, a pinion engaged with the rack, afirst drive means for rotating the pinion in said rack thus causing therack and movable portion of the spray chamber to move in a horizontaldirection. so that rotating the first drive means in a forward directioncauses the movable portion of the spray chamber to move toward thestationary first end wall to position the spray chamber around thecarrier and the article.

5. The apparatus of claim 4 wherein the positioning means furthercomprises a means for activating the first drive means in a forwarddirection.

6. The apparatus of claim 4 wherein the apparatus further comprisesmeans for moving the movable portion of the spray chamber away from thestationary first end wall to permit the carrier to again be moveddownwardly into the bath.

7. The apparatus of claim 6 wherein the means for moving the movableportion of the spray chamber away from the stationary first end wall isthe same as the positioning means and the movement away from thestationary first end wall is accomplished by reversing the drive means.

8. The apparatus of claim 1 wherein the means for moving the carrierdownwardly comprises a holding means for holding the carrier; an armhaving vertical and horizontal sections and first and second ends. thefirst end being at the lowermost portion of the vertical section and thesecond end being at a position on the horizontal section farthest fromthe vertical section. said arm being connected to the holding meansproximate its first end and extending upwardly from the holding means; avertically movable plate having an attached vertical rack saidvertically movable plate being secured to the arm proximate its secondend; a stationary guide for engaging and for holding the verticallymovable plate while permitting the vertically movable plate to move in avertical direction; a second pinion engaged with the rack so that therack. attached plate, arm and holding means move in a downward verticaldirection upon the rotation of the pinion in a forward directipn; and asecond drive means for rotating the pinion in a forward direction.

9. The apparatus of claim 8 wherein the lifting means and means formoving the carrier and article downwardly are the same and the carrierand article are lifted by causing the drive means to rotate the pinionin a reverse direction.

10. The apparatus of claim 7 wherein the means for activating the firstdrive means in a forward direction which causes the movable portion ofthe spray chamber to move toward the stationary first end wall comprisesa feeler switch which is activated by the lifting means when the holdingmeans has been lifted from the bath a sufficient distance to permitpositioning of the spray chamber around the article to separate thearticle from the bath.

ll. The apparatus of claim I wherein the spray means comprises at leastone nozzle located at a position above the carrier and article. saidnozzle being connected to a supply of second liquid under pressure.

12. The apparatus of claim 1] wherein the nozzle is secured to the meansfor moving the carrier and article downwardly at a position above thecarrier and article: and the spray means further comprises a normallyclosed automatic valve having an inlet and outlet, a normally openautomatic valve having an inlet and outlet; a tee having first, secondand third openings; at first conduit connecting the nozzle to the firstopening of the tee: a second conduit connecting the second open ing ofthe tee to the outlet of the normally closed valve; a third conduitconnecting the third opening of the tee to the inlet of the normallyopen valve; a fourth conduit connecting the inlet opening of thenormally closed valve to the supply of second liquid, a fifth conduitconnecting the outlet of the normally open valve to a drain; means foropening the normally closed valve and closing the normally open valvewhen the spray chamber has been positioned around the article andcarrier thus permitting second liquid to pass from the supply of secondliquid through the fourth conduit, the normally closed valve, the secondconduit, the tee, the first conduit and the nozzle to the article; andmeans for again closing the normally closed valve and opening thenormally open valve when spraying is complete thus stopping the flow ofsecond liquid from the supply of second liquid and permitting secondliquid in the nozzle, first conduit, and the tee to drain through thethird con duit, normally open valve and fifth conduit to the drain. =l ll

1. In an apparatus for processing an article comprising a carrier forthe article, means for moving the carrier and article downwardly into abath containing a first liquid, means for lifting the carrier andarticle upwardly from the bath, a spray chamber separate from the bathand means for spraying the article on the carrier with a second liquidwhen the carrier and article are in the spray chamber; the improvementcomprising a spray chamber having a movable portion and means for movingthe movable portion to position the spray chamber around the carrier andarticle and between the article and the bath after the carrier andarticle are lifted upwardly from the bath by the lifting means.
 2. Theapparatus of claim 1 wherein the spray chamber comprises a verticallydirected stationary first end wall and a horizontally movable portioncomprising a bottom wall, first and second vertical side walls securedto the bottom wall at their lower edges and a vertical second end wallhaving a lower edge, said end wall being secured proximate its loweredge to the bottom wall, secured proximate its first vertical edge tothe first vertical side wall and proximate its second vertical edge tothe second vertical sidewall, said horizontally movable portion havingan open end opposite the second end wall facing the stationary first endwall portion, said open end being defined by unsecured edges of the sideand bottom walls, said open end being contiguous to and engaging thestationary first end wall portion when the spray chamber is positiOnedaround the article.
 3. The apparatus of claim 2 wherein the horizontallymovable portion of the spray chamber is supported by and can slide uponat least one horizontal track.
 4. The apparatus of claim 3 wherein themeans for moving the movable portion comprises a rack secured along thehorizontal length of the movable portion of the spray chamber, a pinionengaged with the rack, a first drive means for rotating the pinion insaid rack thus causing the rack and movable portion of the spray chamberto move in a horizontal direction, so that rotating the first drivemeans in a forward direction causes the movable portion of the spraychamber to move toward the stationary first end wall to position thespray chamber around the carrier and the article.
 5. The apparatus ofclaim 4 wherein the positioning means further comprises a means foractivating the first drive means in a forward direction.
 6. Theapparatus of claim 4 wherein the apparatus further comprises means formoving the movable portion of the spray chamber away from the stationaryfirst end wall to permit the carrier to again be moved downwardly intothe bath.
 7. The apparatus of claim 6 wherein the means for moving themovable portion of the spray chamber away from the stationary first endwall is the same as the positioning means and the movement away from thestationary first end wall is accomplished by reversing the drive means.8. The apparatus of claim 1 wherein the means for moving the carrierdownwardly comprises a holding means for holding the carrier; an armhaving vertical and horizontal sections and first and second ends, thefirst end being at the lowermost portion of the vertical section and thesecond end being at a position on the horizontal section farthest fromthe vertical section, said arm being connected to the holding meansproximate its first end and extending upwardly from the holding means; avertically movable plate having an attached vertical rack saidvertically movable plate being secured to the arm proximate its secondend; a stationary guide for engaging and for holding the verticallymovable plate while permitting the vertically movable plate to move in avertical direction; a second pinion engaged with the rack so that therack, attached plate, arm and holding means move in a downward verticaldirection upon the rotation of the pinion in a forward directipn; and asecond drive means for rotating the pinion in a forward direction. 9.The apparatus of claim 8 wherein the lifting means and means for movingthe carrier and article downwardly are the same and the carrier andarticle are lifted by causing the drive means to rotate the pinion in areverse direction.
 10. The apparatus of claim 7 wherein the means foractivating the first drive means in a forward direction which causes themovable portion of the spray chamber to move toward the stationary firstend wall comprises a feeler switch which is activated by the liftingmeans when the holding means has been lifted from the bath a sufficientdistance to permit positioning of the spray chamber around the articleto separate the article from the bath.
 11. The apparatus of claim 1wherein the spray means comprises at least one nozzle located at aposition above the carrier and article, said nozzle being connected to asupply of second liquid under pressure.
 12. The apparatus of claim 11wherein the nozzle is secured to the means for moving the carrier andarticle downwardly at a position above the carrier and article; and thespray means further comprises a normally closed automatic valve havingan inlet and outlet, a normally open automatic valve having an inlet andoutlet; a tee having first, second and third openings; a first conduitconnecting the nozzle to the first opening of the tee; a second conduitconnecting the second opening of the tee to the outlet of the normallyclosed valve; a third conduit connecting the third opening of the tee tothe inlet of the normally open valve; a fourth conduit cOnnecting theinlet opening of the normally closed valve to the supply of secondliquid; a fifth conduit connecting the outlet of the normally open valveto a drain; means for opening the normally closed valve and closing thenormally open valve when the spray chamber has been positioned aroundthe article and carrier thus permitting second liquid to pass from thesupply of second liquid through the fourth conduit, the normally closedvalve, the second conduit, the tee, the first conduit and the nozzle tothe article; and means for again closing the normally closed valve andopening the normally open valve when spraying is complete thus stoppingthe flow of second liquid from the supply of second liquid andpermitting second liquid in the nozzle, first conduit, and the tee todrain through the third conduit, normally open valve and fifth conduitto the drain.